Lab Services and Capabilities

Services:

Lab Access and Training

  • Training in safety, general cleanroom protocol, and micro/nanofabrication
  • Training and access to tools at the NFK lab
  • Advanced techniques

Projects Service

  • NFK staff will execute projects using NFK lab tools

Engineering Support

  • On-site staff to help you find solutions and achieve success

Capabilities:

Etching

  • Chemical etch
  • Plasma etch

Lithography

  • Electron beam lithography (< 20 nm)
  • Conventional photolithography (<1 μm)
  • Maskless photolithography (<0.5 μm)

Deposition

  • Spin coating
  • Physical vapour deposition: electron beam evaporator and sputter coater
  • Chemical printing: ultrasonic microplotter (5 μm)

Micromachining

  • Laser machining (<15 μm)

Characterization

  • Optical microscopy
  • Scanning Electron Microscope (SEM) imaging
  • Stylus profilometry