Access Fees and Equipment Rates (Effective October 1, 2017)
Access fee to cleanroom and equipment includes:
- basic lab training (cleanroom training (gowning, safety protocol))
- introductory equipment training
- basic consumables (gloves, bouffants, paper, wipes)
- other stocked consumables (photoresists, solvents, common acids, developers)
Some equipment has additional fees, as indicated in the table below.
|NFK Academic Rate||NFK Industrial Rate|
|Rates per Equipment (in addition to Access Fee):|
|Reactive Ion Etcher||$30/hr||$90/hr|
|Electron Beam Lithography||$25/hr||$90/hr|
|Scanning Electron Microscope||$25/hr||$90/hr|
|Maskless Lithographic System||$20/hr||$45/hr|
|Sputter Deposition System||$0.05 per Angström||$0.10 per Angström|
|Evaporator (Electron Beam) – Other material||$0.05 per Angström||$0.10 per Angström|
|Evaporator (Electron Beam) – Gold||$0.10 per Angström||$0.20 per Angström|
|Ink-jet Microplotter System*||$35/pipette||$35/pipette|
|Picosecond Laser Micromachining System||$25/hr||$45/hr|
|Spin Coater||No additional fees.
These tools are included
in the access fee.
|Wet chemical fume hood (wet etching, cleaning)|
|Laminar Flow Fume Hood for Lithographic Processing|
*Use of the microplotter will be charged on a cost-recovery basis for consumables. Staff will continue to support the equipment, but no guarantee of results is implied.
Some consumables are stocked and available to users for a fee, as shown in the table below.
|100 mm Silicon wafer, test grade, single-side polished||$25 ea.|
|50 mm Silicon wafer, test grade, single-side polished||$20 ea.|
CMC Subscribers are eligible to apply for MNT Financial Assistance and Travel Awards.
Process Engineer Support Rates
- Academic: $60/hr, Industrial: $100/hr
Training Rates (advanced equipment training beyond introductory training)
- Academic: $25/hr, Industrial: $100/hr
Prices are subject to change at any time and without prior notice.