LAB EQUIPMENT
ETCHING
LITHOGRAPHY
Electron Beam Lithography System: Raith Pioneer
Maskless Lithographic System: Intelligent Micro-Patterning SF-100 XPress
Lithography Sample Preparation: laminar flow hood, spin coater, and baking plates
DEPOSITION
Physical Vapour Deposition (Evaporator): Thermionics 3 kW Linear e-Gun
Chemical Printing System: Sonoplot/GIX Microplotter II Nanoliter Printer
MICROMACHINING
Picosecond Laser Micromachining System: Oxford Lasers A Series
CHARACTERIZATION
Stylus Profilometer: Bruker DektakXT
Optical Microscope: Carl Zeiss Axio Imager A1m