LAB EQUIPMENT

ETCHING

Reactive Ion Etcher (RIE): Trion Minilock III

Plasma Cleaner: Plasmatic Systems Plasma-Preen

LITHOGRAPHY

Electron Beam Lithography System: Raith Pioneer

Maskless Lithographic System: Intelligent Micro-Patterning SF-100 XPress

Photolithography Mask Aligner: Neutronix-Quintel NxQ4006

Lithography Sample Preparation: laminar flow hood, spin coater, and baking plates

DEPOSITION

Physical Vapour Deposition (Sputter): Lesker PVD 75

Physical Vapour Deposition (Evaporator): Thermionics 3 kW Linear e-Gun

Chemical Printing System: Sonoplot/GIX Microplotter II Nanoliter Printer

MICROMACHINING

Picosecond Laser Micromachining System: Oxford Lasers A Series

CHARACTERIZATION

Stylus Profilometer: Bruker DektakXT

Optical Microscope: Carl Zeiss Axio Imager A1m