LAB USER FEES
ACCESS FEES AND EQUIPMENT RATES (EFFECTIVE JANUARY 1, 2023)
Access fee to cleanroom and equipment includes:
- basic lab training (cleanroom, gowning, and safety training)
- introductory equipment training
- basic consumables (gloves, bouffants, paper, wipes)
- other stocked consumables (photoresists, solvents, common acids, developers)
Some equipment has additional fees, as indicated in the table below:
| NFK Academic Rate | NFK Industrial Rate | |
| Access Fee: | $35/hr | $95/hr |
| Rates per Equipment (in addition to Access Fee): | ||
| Reactive Ion Etcher | $15/hr | $45/hr |
| Electron Beam Lithography | $25/hr | $50/hr |
| Scanning Electron Microscope | $25/hr | $50/hr |
| Maskless Lithographic System | $20/hr | $45/hr |
| Mask Aligner | $10/hr | $15/hr |
| Sputter Deposition System | $0.05 per Angström | $0.10 per Angström |
| Evaporator (Electron Beam) – Other material | $0.05 per Angström | $0.10 per Angström |
| Evaporator (Electron Beam) – Precious material | $0.10 per Angström | $0.20 per Angström |
| Ink-jet Microplotter System* | $35/pipette | $35/pipette |
| Picosecond Laser Micromachining System | $25/hr | $45/hr |
| Spin Coater | No additional fees. These tools are included in the access fee. |
|
| Wet chemical fume hood (wet etching, cleaning) | ||
| Laminar Flow Fume Hood for Lithographic Processing (spin coater, hot plate) | ||
| Probe station with 4-point probe | ||
| Plasma Cleaner | ||
| Optical Microscope | ||
| Spectroscopic Ellipsometer | ||
| Profilometer | ||
*Use of the microplotter will be charged on a cost-recovery basis for consumables. Staff will continue to support the equipment, but no guarantee of results is implied.
Some consumables are stocked and available to users for a fee, as shown in the table below.
| Description | NFK Rate |
| 100 mm Silicon wafer, test grade, single-side polished | $25 ea. |
| 50 mm Silicon wafer, test grade, single-side polished | $20 ea. |
| 100 mm Silicon wafer, prime grade, with 300 nm WTO | $70 ea. |
| 100 mm Silicon wafer, test grade, with 1000 nm WTO | $50 ea. |
| Single wafer carrier trays for 50 mm or 100 mm Silicon wafers | $10 ea. |
| Photomask blank, 6", soda lime, chrome, with case | $100 ea. |
| GelPaks, #4, 2"x2" or 2"x3", clear | $15 ea. |
| GelPaks, #4, 4"x6", clear | $30 ea. |
Process Engineer Support Rates
- Academic: $70/hr, Industrial: $125/hr
Training Rates (advanced equipment training beyond introductory training)
- Academic: $35/hr, Industrial: $125/hr
Prices are subject to change at any time and without prior notice.
CMC Subscribers are eligible to apply for MNT Awards to help complete fabrication projects at NFK and elsewhere.